Concepedia

Marco Aimi

MA

Statistics

Publications

3

Citations

268

H-Index

3

Active since

2004

Affiliations

University of California, Santa Barbara(Current)

Marco Aimi is an author at University of California, Santa Barbara specializing in microfabrication, micromachining, and engineering.

Publications per year

2004–2005

3

Publications

3

High-aspect-ratio bulk micromachining of titanium

Marco Aimi, Masaru P. Rao, Noel C. MacDonald et al. · Nature Materials · 2004 · 130 citations

, , +11

Inductively Coupled Plasma Etching of Bulk Titanium for MEMS Applications

E. R. Parker, B.J. Thibeault, Marco Aimi et al. · Journal of The Electrochemical Society · 2005 · 94 citations

, , +17

Single-mask, three-dimensional microfabrication of high-aspect-ratio structures in bulk silicon using reactive ion etching lag and sacrificial oxidation

Masaru P. Rao, Marco Aimi, Noel C. MacDonald · Applied Physics Letters · 2004 · 44 citations

, , +17

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