Concepedia
Materials Science in Semiconductor Processing · 2022 · 20 citations · 19 references
EngineeringMaterials EngineeringMaterials ScienceMaterials ProcessingMetallurgySurface EngineeringMetal FabricationSurface Finish QualitySurface FinishingChemical-mechanical Polishing CleanlinessMechanical Polishing
19
The Theory and Design of Plate Glass Polishing Machines
F. W. Preston · Medical Entomology and Zoology · 1927 · 740 citations
Engineering, Manufacturing Engineering, Materials Engineering +6
Material removal mechanism in chemical mechanical polishing: theory and modeling
Jianfeng Luo, David Dornfeld · IEEE Transactions on Semiconductor Manufacturing · 2001 · 641 citations
Engineering, Materials Engineering, Materials Science +16
Chemical‐Mechanical Polishing for Fabricating Patterned W Metal Features as Chip Interconnects
F. B. Kaufman, Daniel B. Thompson, R. E. Broadie et al. · Journal of The Electrochemical Society · 1991 · 511 citations
Engineering, Materials Engineering, Materials Science +17
Application of Chemical Mechanical Polishing to the Fabrication of VLSI Circuit Interconnections
W. Patrick, W. L. Guthrie, C. L. Standley et al. · Journal of The Electrochemical Society · 1991 · 237 citations
Engineering, Electrical Engineering, Materials Science +17
Development of a novel chemical mechanical polishing slurry and its polishing mechanisms on a nickel alloy
Zhenyu Zhang, Longxing Liao, Xinze Wang et al. · Applied Surface Science · 2019 · 206 citations
Engineering, Materials Engineering, Materials Science +12