Properties of ultrathin molybdenum films for interconnect applications

Valeria Founta, Jean-Philippe Soulié, Kiroubanand Sankaran, Kris Vanstreels, Karl Opsomer, P. Morin, Pieter Lagrain, Alexis Franquet, Danielle Vanhaeren, Thierry Conard,

Materialia · 2022 · 62 citations · 71 references

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