Design of electrostatic actuated MEMS biaxial scanning micro-mirror with serpentine structure

Gimbal-Less Monolithic Silicon Actuators for Tip–Tilt–Piston Micromirror Applications

V. Milanović, G.A. Matus, Daniel T. McCormick · IEEE Journal of Selected Topics in Quantum Electronics · 2004 · 212 citations

Engineering, Electrical Engineering, Actuators +10

Silicon-micromachined scanning confocal optical microscope

David L. Dickensheets, G. S. Kino · Journal of Microelectromechanical Systems · 1998 · 186 citations

Engineering, Materials Engineering, Materials Science +13

3D In Vivo optical coherence tomography based on a low-voltage, large-scan-range 2D MEMS mirror

Jingjing Sun, Shuguang Guo, Lei Wu et al. · Optics Express · 2010 · 153 citations · Full text

Engineering, Bioengineering, Biomedical Engineering +17

Three-dimensional endoscopic optical coherence tomography by use of a two-axis microelectromechanical scanning mirror

Woonggyu Jung, Daniel T. McCormick, Jun Zhang et al. · Applied Physics Letters · 2006 · 120 citations · Full text

Engineering, Biomedical Engineering, Biomedical Imaging +15

Comb-Actuated Resonant Torsional Microscanner With Mechanical Amplification

Aslihan Arslan, Dean Brown, Wyatt O. Davis et al. · Journal of Microelectromechanical Systems · 2010 · 95 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +15