Microelectronic Engineering · 2022 · 12 citations · 27 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsDevice CharacterizationSemiconductor Device MaterialsSemiconductor Thin FilmsThin Film Electrical PropertiesThin-film MaterialsThin-film TransistorsElectrical PropertiesOxide Thin-film TransistorsSemiconductor Oxide Thin FilmsThin Oxide FilmsThin Oxide LayersThin-film OxidesThin-film Semiconductors
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A new method to determine MOSFET channel length
Jenn-Gang Chern, Po‐Han Chang, R.F. Motta et al. · IEEE Electron Device Letters · 1980 · 312 citations