CMOS/BICMOS SELF-ASSEMBLING AND ELECTROTHERMAL MICROACTUATORS FOR TUNABLE CAPACITORS, GAP-CLOSING STRUCTURES AND LATCH MECHANISMS

Abstract

CMOS/BiCMOS MEMS micromovers that use the principles of self-assembly and electrothermal actuation have been designed, fabricated and tested. These micromovers exhibit lateral micropositioning of up to 25 m. Three main applications are demonstrated: tunable capacitors, gap-closing structures and latch mechanisms. A 2.17 to 1 capacitor tuning range was measured from 400 fF to 866 fF within a 5 V control voltage. Mechanical latch structures that operate by sequencing micromovers enable zero-power stand-by operation of the capacitors. Micromovers are also used to form 300 nm gaps, which are integrated into a microresonator design. Finite-element simulation of displacements of the lateral self-assembly and actuation match measured results to within 20%.