Concepedia
Vacuum · 2021 · 28 citations · 53 references
Natural SciencesElectrical EngineeringPhysicsCondensed Matter PhysicsPlasma PhysicsSurface ScienceDevice SimulationMonte Carlo SimulationMagnetron SputteringSputteringSputtering EffectsSputtering ProcessesSputtering TechniquesVoltage
53
The microstructure of sputter‐deposited coatings
John A. Thornton · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 1.3K citations
Natural Sciences, Materials Engineering, Materials Science +16
A structure zone diagram including plasma-based deposition and ion etching
André Anders · Thin Solid Films · 2009 · 909 citations
Cold-cathode discharges and breakdown in argon: surface and gas phase production of secondary electrons
A. V. Phelps, Zoran Petrović · Plasma Sources Science and Technology · 1999 · 891 citations
Natural Sciences, Materials Science, Electronic Materials +15
Physics and technology of magnetron sputtering discharges
Plasma Sources Science and Technology · 2020 · 502 citations · Full text
Natural Sciences, Electrical Engineering, Materials Engineering +13
Sputtering—a review of some recent experimental and theoretical aspects
H. Oechsner · Applied Physics A · 1975 · 298 citations
Natural Sciences, Materials Engineering, Materials Science +10