Concepedia

Sputtering—a review of some recent experimental and theoretical aspects

H. Oechsner

Applied Physics A · 1975 · 298 citations · 105 references

DOI

Concepts

References

105

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 3.5K citations

, , +13

Handbook of Thin Film Technology

L. I. Maissel, R. Glang, Paul P. Budenstein · Journal of The Electrochemical Society · 1971 · 2.8K citations

, , +12

Energy Dissipation by Ions in the kev Region

J. Lindhard, M. Scharff · Physical Review · 1961 · 1.4K citations

, , +12

II. The energy spectrum of ejected atoms during the high energy sputtering of gold

M. W. Thompson · Philosophical magazine · 1968 · 1.2K citations

, , +15

Sputtering Yields of Metals for Ar+ and Ne+ Ions with Energies from 50 to 600 ev

N. Laegreid, G. K. Wehner · Journal of Applied Physics · 1961 · 807 citations

, , +13