Structure design and optimization of SOI high-temperature pressure sensor chip

Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors

Samuel Kelly Clark, K.D. Wise · IEEE Transactions on Electron Devices · 1979 · 299 citations

Engineering, Materials Engineering, Mechanical Engineering +17

Semiconducting Stress Transducers Utilizing the Transverse and Shear Piezoresistance Effects

W. G. Pfann, R. N. Thurston · Journal of Applied Physics · 1961 · 225 citations

Natural Sciences, Materials Engineering, Materials Science +17

A novel MEMS pressure sensor fabricated on an optical fiber

Don C. Abeysinghe, Samhita Dasgupta, J. T. Boyd et al. · IEEE Photonics Technology Letters · 2001 · 178 citations

Engineering, Materials Science, Mechanical Engineering +17

A simulation program for the sensitivity and linearity of piezoresistive pressure sensors

Liwei Lin, Huey-Chi Chu, Yen‐Wen Lu · Journal of Microelectromechanical Systems · 1999 · 134 citations

Engineering, Materials Engineering, Materials Science +17

Micro-machined gas sensor array based on metal film micro-heater

Yaowu Mo, Yuzo Okawa, Motoshi Tajima et al. · Sensors and Actuators B Chemical · 2001 · 119 citations

Engineering, Materials Science, Mechanical Engineering +13