Differential MEMS capacitance diaphragm vacuum gauge with high sensitivity and wide range

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Chemical Engineering, Air Sampling, Engineering +14

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Wearable System, Engineering, Accelerometer +18

IEEE Transactions for Electron Devices

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Ieee Transactions, Electrical Engineering, Electronic Devices +3

Touch mode capacitive pressure sensors

Wen H. Ko, Qiang Wang · Sensors and Actuators A Physical · 1999 · 238 citations

Engineering, Sensors, Touch User Interface +4

Modeling of touch mode capacitive sensors and diaphragms

Qiang Wang, Wen H. Ko · Sensors and Actuators A Physical · 1999 · 87 citations

Engineering, Sensors, Touch User Interface +6