Concepedia
Statistics
Publications
9
Citations
187
H-Index
Active since
2016
Affiliations
Xiamen University(Current)
Xiamen University of Technology
Mahui Xu is an author at Xiamen University specializing in engineering, sensors, and mems sensors.
Publications per year
2016–2022
Design and fabrication of an absolute pressure MEMS capacitance vacuum sensor based on silicon bonding technology
Mahui Xu, Xiaodong Han, Xin Ke et al. · Vacuum · 2021 · 38 citations
Engineering, Materials Science, Mechanical Engineering +12
Design and experiment of a touch mode MEMS capacitance vacuum gauge with square diaphragm
Xiaodong Han, Mahui Xu, Gang Li et al. · Sensors and Actuators A Physical · 2020 · 29 citations
Engineering, Electrical Engineering, Mechanical Engineering +12
Design and fabrication of a D33-mode piezoelectric micro-accelerometer
Mahui Xu, Hui Zhou, Linhui Zhu et al. · Microsystem Technologies · 2019 · 23 citations
Engineering, Mechanical Engineering, Mechatronics Engineering +12
Design and Fabrication of a MEMS Capacitance Vacuum Sensor Based on Silicon Buffer Block
Mahui Xu, Xiaodong Han, Chenxi Zhao et al. · Journal of Microelectromechanical Systems · 2020 · 22 citations
Engineering, Electrical Engineering, Mechanical Engineering +17
Differential MEMS capacitance diaphragm vacuum gauge with high sensitivity and wide range
Xiaodong Han, Gang Li, Mahui Xu et al. · Vacuum · 2021 · 20 citations
Engineering, Electrical Engineering, Mechanical Engineering +14
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