Applied Physics A · 2020 · 10 citations · 39 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsAtomic Layer DepositionSemiconductor SurfacesSemiconductor Thin FilmsSilicon MaterialsThin-film DepositionThin-film MaterialsPlasma-enhanced Atomic Layer DepositionPlasma-enhanced DepositionSilicon CarbideSilicon Carbide (Sic) MaterialsSilicon Thin Films
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High dielectric constant oxides
John Robertson · The European Physical Journal Applied Physics · 2004 · 1.8K citations · Full text
Atomic-scale simulation of ALD chemistry
Simon D. Elliott · Semiconductor Science and Technology · 2012 · 123 citations · Full text