Plasma-enhanced atomic layer-deposited La2O3 ultra-thin films on Si and 6H–SiC: a comparative study - Concepedia

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Plasma-enhanced atomic layer-deposited La2O3 ultra-thin films on Si and 6H–SiC: a comparative study

10

Citations

37

References

2020

Year

Khushabu Agrawal, Viral Barhate, Vilas Patil, L. S. Patil, Ashok M. Mahajan

Applied Physics A

References

	Year	Citations

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