Concepedia

L. S. Patil

LS

Statistics

Publications

11

Citations

273

H-Index

10

Active since

2003

Affiliations

Kavayitri Bahinabai Chaudhari North Maharashtra University(Current)

Government Medical College

Mahindra and Mahindra Limited (India)

L. S. Patil is an author at Kavayitri Bahinabai Chaudhari North Maharashtra University specializing in natural sciences, materials science, and materials engineering.

Publications per year

2003–2020

11

Publications

11

Growth of SiO2 films by TEOS-PECVD system for microelectronics applications

Ashok M. Mahajan, L. S. Patil, Jaspal P. Bange et al. · Surface and Coatings Technology · 2003 · 49 citations

, , +15

Growth and characterization of SiON thin films by using thermal-CVD machine

R.K. Pandey, L. S. Patil, Jaspal P. Bange et al. · Optical Materials · 2003 · 48 citations

, , +12

GROWTH AND CHARACTERIZATION OF SiO<sub>2</sub> FILMS DEPOSITED BY FLAME HYDROLYSIS DEPOSITION SYSTEM FOR PHOTONIC DEVICE APPLICATION

Jaspal P. Bange, L. S. Patil, D. K. Gautam · Progress In Electromagnetics Research M · 2008 · 38 citations · Full text

, , +17

Effect of deposition temperature on the chemical properties of thermally deposited silicon nitride films

L. S. Patil, R. K. Pandey, Jaspal P. Bange et al. · Optical Materials · 2004 · 29 citations

, , +14

Growth and characterization of silicon nitride films for optoelectronics applications

R.K. Pandey, L. S. Patil, Jaspal P. Bange et al. · Optical Materials · 2004 · 27 citations

, , +14

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