L. S. Patil

Growth and characterization of SiON thin films by using thermal-CVD machine

R.K. Pandey, L. S. Patil, Jaspal P. Bange et al. · Optical Materials · 2003 · 48 citations

Materials Science, Engineering, Sion Thin Films +9

Growth of SiO2 films by TEOS-PECVD system for microelectronics applications

Ashok M. Mahajan, L. S. Patil, Jaspal P. Bange et al. · Surface and Coatings Technology · 2003 · 47 citations

Materials Science, Electrical Engineering, Epitaxial Growth +9

GROWTH AND CHARACTERIZATION OF SiO<sub>2</sub> FILMS DEPOSITED BY FLAME HYDROLYSIS DEPOSITION SYSTEM FOR PHOTONIC DEVICE APPLICATION

Jaspal P. Bange, L. S. Patil, D. K. Gautam · Progress In Electromagnetics Research M · 2008 · 38 citations · Full text

Materials Science, Optical Materials, Engineering +13

Effect of deposition temperature on the chemical properties of thermally deposited silicon nitride films

L. S. Patil, R. K. Pandey, Jaspal P. Bange et al. · Optical Materials · 2004 · 29 citations

Materials Science, Engineering, Surface Science +8

Growth and characterization of silicon nitride films for optoelectronics applications

R.K. Pandey, L. S. Patil, Jaspal P. Bange et al. · Optical Materials · 2004 · 27 citations

Materials Science, Optical Materials, Engineering +10