Concepedia

Publication | Closed Access

Growth of SiO2 films by TEOS-PECVD system for microelectronics applications

DOI

47

Citations

10

References

2003

Year

Ashok M. Mahajan, L. S. Patil, Jaspal P. Bange, D. K. Gautam
Surface and Coatings Technology

References

YearCitations

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