Publication | Closed Access
Growth and characterization of SiON thin films by using thermal-CVD machine
48
Citations
26
References
2003
Year
Materials ScienceEngineeringSion Thin FilmsNanoelectronicsApplied PhysicsSemiconductor Device FabricationThin FilmsSilicon On InsulatorMicroelectronicsThermal-cvd MachineChemical Vapor DepositionThin Film Processing
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