IEEE Electron Device Letters · 2020 · 12 citations · 13 references
EngineeringComputer EngineeringElectrical EngineeringLow-power DesignMicroelectromechanical SystemsMicroelectronicsCmos Circuit DesignIntegrated Circuit DesignMems DesignNanoelectromechanical SystemsNanoelectronicsPhysical DesignCmos Logic CircuitsCmos Logic DesignDamascene ProcessDual Damascene ProcessIntegrated Nanoelectromechanical SystemsPower ConsumptionReconfigurable Logic ArchitectureTri-state Buffering
Island-style monolithic three-dimensional (M3D) CMOS- nanoelectromechanical (CMOS-NEM) reconfigurable logic (RL) circuits are experimentally demonstrated showing the full operation of the island-style RL: single-tile and tile-to-tile operation. For the fabrication of M3D CMOS-NEM RL circuits, 65-nm CMOS baseline process was used, in which copper NEM memory switches are integrated over the CMOS logic circuits by using dual damascene process. It is predicted that our proposed M3D CMOS-NEM RL circuits will exhibit 4.6× higher chip density, 2.3× higher operation frequency and 9.3x lower power consumption than CMOS-only ones (tri-state buffer case) for tile-to-tile operation.
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Efficient FPGAs using nanoelectromechanical relays
Chen Chen, Roozbeh Parsa, Nishant Patil et al. · 2010 · 77 citations
Engineering, Computer Engineering, Electrical Engineering +16