Optics & Laser Technology · 2019 · 22 citations · 11 references
EngineeringElectrical EngineeringMechatronics EngineeringMicroelectromechanical SystemsOpticsOptoelectronicsMems ActuatorsMems DesignMems FabricationMems SensorsMems SimulationOptical MemsLidar SensingLidar SensorsLidar SystemsOptical DesignOptical Scanners
11
A small-gap electrostatic micro-actuator for large deflections
Holger Conrad, Harald Schenk, Bert Kaiser et al. · Nature Communications · 2015 · 113 citations · Full text
Engineering, Electrical Engineering, Mechanical Engineering +16