Optical characterization of sputtered aluminum nitride thin films – correlating refractive index with degree of c-axis orientation

Optical properties of thin films

D. E. Aspnes · Thin Solid Films · 1982 · 1.6K citations

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Growth and applications of Group III-nitrides

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Zero-Temperature-Coefficient SAW Devices on AlN Epitaxial Films

K. Tsubouchi, Nobuo Mikoshiba · IEEE Transactions on Sonics and Ultrasonics · 1985 · 492 citations · Full text

Engineering, Electrical Engineering, Materials Science +15

Integrated power harvesting system including a MEMS generator and a power management circuit

M. Marzencki, Yasser Ammar, Skandar Basrour · Sensors and Actuators A Physical · 2007 · 245 citations

Engineering, Electrical Engineering, Mechatronics Engineering +14

The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films

A. Ababneh, U. Schmid, J. Hernando et al. · Materials Science and Engineering B · 2010 · 196 citations

Natural Sciences, Materials Engineering, Materials Science +16