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Optical characterization of sputtered aluminum nitride thin films – correlating refractive index with degree of c-axis orientation

Materials ScienceAluminium NitrideOptical MaterialsEngineeringSputtered AluminumOptical PropertiesSurface ScienceApplied PhysicsThin Film Process TechnologyThin FilmsOptical CharacterizationOptical ComponentsRefractive IndexThin Film ProcessingDiffractive Optic