Concepedia

Modification of magnetron sputter deposition of nc-WC/a-C(:H) coatings with an additional RF discharge

Marcin Makówka, Wojciech Pawlak, P. Konarski, B. Wendler, H. Szymanowski

Diamond and Related Materials · 2019 · 16 citations · 60 references

DOI

Concepts

References

60

Diamond-like amorphous carbon

John Robertson · Materials Science and Engineering R Reports · 2002 · 6.1K citations

Resonant Raman spectroscopy of disordered, amorphous, and diamondlike carbon

Andrea C. Ferrari, John Robertson · Physical review. B, Condensed matter · 2001 · 3K citations

, , +17

A novel pulsed magnetron sputter technique utilizing very high target power densities

V. Kouznetsov, K. Macák, Jochen M. Schneider et al. · Surface and Coatings Technology · 1999 · 1.1K citations

, , +7

Magnetron sputtering – Milestones of 30 years

Bernd Szyszka, Michael Vergöhl, Ralf Bandorf · Vacuum · 2010 · 410 citations

, , +5

Magnetron sputter deposition with high levels of metal ionization

S. M. Rossnagel, Jeffrey Hopwood · Applied Physics Letters · 1993 · 265 citations

, , +16