Responsivity and sensitivity of piezoelectric MEMS resonators at higher order modes in liquids

Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope

John E. Sader · Journal of Applied Physics · 1998 · 1.4K citations

Engineering, Mechanical Engineering, Physics +16

Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope: Arbitrary mode order

Cornelis A. Van Eysden, John E. Sader · Journal of Applied Physics · 2007 · 239 citations

Natural Sciences, Mechanical Engineering, Physics +17

Thin-film piezoelectric-on-silicon resonators for high-frequency reference oscillator applications

Reza Abdolvand, Hossein Miri Lavasani, G.K. Ho et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2008 · 221 citations

Engineering, Electrical Engineering, Microelectronics +13

Temperature Dependence of the Piezoresistance of High-Purity Silicon and Germanium

François Morin, T. H. Geballe, Conyers Herring · Physical Review · 1957 · 184 citations

Natural Sciences, Materials Science, Physics +17

An AlN MEMS Piezoelectric Microphone for Aeroacoustic Applications

Matthew D. Williams, Benjamin A. Griffin, Tiffany N. Reagan et al. · Journal of Microelectromechanical Systems · 2012 · 183 citations

Engineering, Aerospace Engineering, Materials Science +17