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Effect of bias voltage on microstructure and optical properties of Al2O3 thin films prepared by twin targets reactive high power impulse magnetron sputtering

Materials ScienceMaterials EngineeringAluminium NitrideOptical MaterialsEngineeringMaterial AnalysisOptical PropertiesOxide ElectronicsApplied PhysicsTwin TargetsAl2o3 Thin FilmsBias VoltageThin FilmsThin Film Processing