AlN Wafers Fabricated by Hydride Vapor Phase Epitaxy - Concepedia

Concepedia

Publication | Open Access

AlN Wafers Fabricated by Hydride Vapor Phase Epitaxy

DOI Full Paper Access

16

Citations

2

References

2000

Year

A. E. Nikolaev, Irina P. Nikitina, A. S. Zubrilov, M. G. Mynbaeva, Yuriy Melnik, V. Dmitriev

MRS Internet Journal of Nitride Semiconductor Research

Materials EngineeringMaterials ScienceAluminium NitrideEngineeringAln Wafers FabricatedApplied PhysicsMolecular Beam EpitaxyChemical Vapor Deposition

References

	Year	Citations

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