Physical Chemistry Chemical Physics · 2018 · 50 citations · 24 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface ChemistrySurface ScienceAluminum OxidesAtomic Layer DepositionMetal OxidesSemiconductor SurfacesSurface PhysicsX-ray Photoelectron SpectroscopyAtomic Layer Deposition PrecursorsDefect StatesElectronic Structure AnalysisOxide Defect StatesPrecursor ChemistryRutile OxidesThin Oxide LayersTitanium Oxides
upon dosing of trimethylaluminium. These defect states become locked into the heterojunction's interface, with implications to its electronic structure, and can act as an indicator as to when complete coverage of the rutile substrate is achieved.
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Al3O3 thin film growth on Si(100) using binary reaction sequence chemistry
A. W. Ott, J. W. Klaus, J. M. Johnson et al. · Thin Solid Films · 1997 · 512 citations
Mark Jackman, Andrew G. Thomas, C.A. Muryn · The Journal of Physical Chemistry C · 2015 · 259 citations · Full text