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Sub-microsecond response time deep-ultraviolet photodetectors using α-Ga2O3 thin films grown via low-temperature atomic layer deposition

PhotonicsElectrical EngineeringEngineeringα-Ga2o3 Thin FilmsOptoelectronic MaterialsApplied PhysicsGallium OxidePhotoelectric MeasurementOptoelectronic DevicesThin FilmsPulsed Laser DepositionOptoelectronics