Characterization and Optimization of Inverted-T FinFET Under Nanoscale Dimensions

Abstract

In this paper, a p-type inverted-T FinFET (IT FinFET) has been optimally structured. Focus is made on analyzing the inferior characteristics reported from the previously fabricated IT FinFETs, and obtaining better performances through a novel structure. IT FinFET has a higher layout efficiency and can thus provide larger drain current (I <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">D</sub> ) under the same dimension as that of a silicon-on-insulator (SOI) FinFET by securing the extended channels of ultrathin body (UTB) on the field region. We closely observe the leverages of fin width (W <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">fin</sub> ), UTB height (H <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">UTB</sub> ), and gate length (L <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">g</sub> ) on the operation characteristics using a 3-D technology computer-aided design simulation with quantum-mechanical models. W <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">fin</sub> below 10 nm is evaluated to be suitable for strong gate controllability.We first examine a critical H <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">UTB</sub> , beyond which a higher drive current is not obtained even with a greater channel width than that of FinFET. When H <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">UTB</sub> = 3 and 10 nm, IT FinFET yields 13.3% and 142% of saturation current improvement compared with SOI FinFET under the same footprint. At extremely scaled L <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">g</sub> , although the immunity against short-channel effects is slightly weaker than that of SOI FinFET, optimally designed IT FinFET can produce a higher current and demonstrates shorter intrinsic delay times.