P‐127: Dual‐Gate Self‐Aligned IGZO TFTs Monolithically Integrated with High‐Temperature Bottom Moisture Barrier for Flexible AMOLED

Abstract

We present a 350°C self‐aligned dual‐gate a‐IGZO backplane technology with a monolithically integrated multi‐layer high‐temperature thin‐film barrier for flexible AMOLED. Thin‐film barrier properties and TFT technology are optimized on 320 x 352mm substrates, and demonstrated in a flexible QQVGA 100 ppi AMOLED display prototype.