Excitation of Ar, O<sub>2</sub>, and SF<sub>6</sub>/O<sub>2</sub> plasma discharges using tailored voltage waveforms: control of surface ion bombardment energy and determination of the dominant electron excitation mode - Concepedia

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Excitation of Ar, O<sub>2</sub>, and SF<sub>6</sub>/O<sub>2</sub> plasma discharges using tailored voltage waveforms: control of surface ion bombardment energy and determination of the dominant electron excitation mode

13

Citations

30

References

2018

Year

Guillaume Fischer, Karim Ouaras, Etienne Drahi, Bastien Bruneau, Erik Johnson

Plasma Sources Science and Technology

Electrical EngineeringEngineeringPhysicsApplied PhysicsAtomic PhysicsPlasma SciencePlasma PhysicsGas Discharge PlasmaPlasma ApplicationTailored Voltage Waveforms

References

	Year	Citations

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