Bastien Bruneau

Strong Ionization Asymmetry in a Geometrically Symmetric Radio Frequency Capacitively Coupled Plasma Induced by Sawtooth Voltage Waveforms

Bastien Bruneau, Timo Gans, Deborah O’Connell et al. · Physical Review Letters · 2015 · 123 citations

Electrical Engineering, Strong Ionization Asymmetry, Symmetric Parallel Plate +15

Power coupling mode transitions induced by tailored voltage waveforms in capacitive oxygen discharges

Aranka Derzsi, Bastien Bruneau, Andrew Gibson et al. · Plasma Sources Science and Technology · 2017 · 58 citations · Full text

Growth mechanisms study of microcrystalline silicon deposited by SiH4/H2 plasma using tailored voltage waveforms

Bastien Bruneau, J. Wang, Jean-Christophe Dornstetter et al. · Journal of Applied Physics · 2014 · 29 citations

Engineering, Sih4/h2 Plasma, Silicon On Insulator +20

Controlling the shape of the ion energy distribution at constant ion flux and constant mean ion energy with tailored voltage waveforms

Bastien Bruneau, Trevor Lafleur, Jean‐Paul Booth et al. · Plasma Sources Science and Technology · 2016 · 28 citations

Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas

Bastien Bruneau, Ihor Korolov, Trevor Lafleur et al. · Journal of Applied Physics · 2016 · 21 citations · Full text

Electrical Engineering, Engineering, Amplitude Asymmetry +13