Controlling the shape of the ion energy distribution at constant ion flux and constant mean ion energy with tailored voltage waveforms - Concepedia

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Controlling the shape of the ion energy distribution at constant ion flux and constant mean ion energy with tailored voltage waveforms

28

Citations

36

References

2016

Year

Bastien Bruneau, Trevor Lafleur, Jean‐Paul Booth, Erik Johnson

Plasma Sources Science and Technology

Abstract

International audience

References

	Year	Citations

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