Erik Johnson

Separate control of the ion flux and ion energy in capacitively coupled radio-frequency discharges using voltage waveform tailoring

Trevor Lafleur, Pierre-Alexandre Delattre, Erik Johnson et al. · Applied Physics Letters · 2012 · 100 citations

Natural Sciences, Electrical Engineering, Physics +11

Radio-frequency capacitively coupled plasmas excited by tailored voltage waveforms: comparison of experiment and particle-in-cell simulations

Pierre-Alexandre Delattre, Trevor Lafleur, Erik Johnson et al. · Journal of Physics D Applied Physics · 2013 · 82 citations

Natural Sciences, Electrical Engineering, Physics +16

Nanocrystalline silicon film growth morphology control through RF waveform tailoring

Erik Johnson, T. Verbeke, Jean‐Charles Vanel et al. · Journal of Physics D Applied Physics · 2010 · 81 citations

Natural Sciences, Materials Science, Physics +17

Synthesis of silicon nanocrystals in silane plasmas for nanoelectronics and large area electronic devices

P. Roca i Cabarrocas, Thuat Nguyen-Tran, Y. Djeridane et al. · Journal of Physics D Applied Physics · 2007 · 78 citations

Natural Sciences, Materials Engineering, Materials Science +17

Ion flux asymmetry in radiofrequency capacitively-coupled plasmas excited by sawtooth-like waveforms

Benoit G. Bruneau, Tatiana Novikova, Trevor Lafleur et al. · Plasma Sources Science and Technology · 2014 · 73 citations

Natural Sciences, Physics, Pattern Formation +16