Pierre-Alexandre Delattre

Separate control of the ion flux and ion energy in capacitively coupled radio-frequency discharges using voltage waveform tailoring

Trevor Lafleur, Pierre-Alexandre Delattre, Erik Johnson et al. · Applied Physics Letters · 2012 · 98 citations

Radio-frequency capacitively coupled plasmas excited by tailored voltage waveforms: comparison of experiment and particle-in-cell simulations

Pierre-Alexandre Delattre, Trevor Lafleur, Erik Johnson et al. · Journal of Physics D Applied Physics · 2013 · 81 citations

Microcrystalline silicon solar cells deposited using a plasma process excited by tailored voltage waveforms

Erik Johnson, Pierre-Alexandre Delattre, Jean‐Paul Booth · Applied Physics Letters · 2012 · 50 citations

Engineering, Asymmetric Voltage Waveform, Photovoltaic Devices +22

Hydrogenated microcrystalline silicon thin films deposited by RF-PECVD under low ion bombardment energy using voltage waveform tailoring

Erik Johnson, S. Pouliquen, Pierre-Alexandre Delattre et al. · Journal of Non-Crystalline Solids · 2012 · 42 citations

Materials Science, Engineering, Microfabrication +8

Capacitively coupled radio-frequency plasmas excited by tailored voltage waveforms

Trevor Lafleur, Pierre-Alexandre Delattre, Erik Johnson et al. · Plasma Physics and Controlled Fusion · 2013 · 30 citations