Radio-frequency capacitively coupled plasmas excited by tailored voltage waveforms: comparison of experiment and particle-in-cell simulations

Cold-cathode discharges and breakdown in argon: surface and gas phase production of secondary electrons

A. V. Phelps, Zoran Petrović · Plasma Sources Science and Technology · 1999 · 891 citations

Natural Sciences, Materials Science, Electronic Materials +15

The application of scattering cross sections to ion flux models in discharge sheaths

A. V. Phelps · Journal of Applied Physics · 1994 · 445 citations

Natural Sciences, Physics, Electromagnetism +15

On the possibility of making a geometrically symmetric RF-CCP discharge electrically asymmetric

B. Heil, Uwe Czarnetzki, Ralf Peter Brinkmann et al. · Journal of Physics D Applied Physics · 2008 · 285 citations

Natural Sciences, Electrical Engineering, Physics +13

Simulation benchmarks for low-pressure plasmas: Capacitive discharges

Physics of Plasmas · 2013 · 274 citations · Full text

Natural Sciences, Computer Science, Physics +14

The hairpin resonator: A plasma density measuring technique revisited

R. B. Piejak, Valery Godyak, Richard Garner et al. · Journal of Applied Physics · 2004 · 246 citations

Engineering, Electrical Engineering, Physics +16