Valery Godyak

Measurement of electron energy distribution in low-pressure RF discharges

Valery Godyak, R. B. Piejak, B. M. Alexandrovich · Plasma Sources Science and Technology · 1992 · 750 citations

Electrical Engineering, Eedf Measurements, Engineering +10

Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz

Valery Godyak, R. B. Piejak · Physical Review Letters · 1990 · 542 citations

Engineering, Heating-mode Transition, Plasma Science +16

Electron energy distribution function measurements and plasma parameters in inductively coupled argon plasma

Valery Godyak, R. B. Piejak, B. M. Alexandrovich · Plasma Sources Science and Technology · 2002 · 360 citations

Engineering, Plasma Science, Icp Parameters +20

Probe measurements of electron-energy distributions in plasmas: what can we measure and how can we achieve reliable results?

Valery Godyak, V. I. Demidov · Journal of Physics D Applied Physics · 2011 · 358 citations

Engineering, Measurement, Correct Probe Design +18

Probe diagnostics of non-Maxwellian plasmas

Valery Godyak, R. B. Piejak, B. M. Alexandrovich · Journal of Applied Physics · 1993 · 304 citations

Engineering, Plasma Science, Plasma Physics +20