The application of scattering cross sections to ion flux models in discharge sheaths

Abstract

We suggest consistent sets of Ar++Ar and Ar+++Ar differential and integral cross sections for modeling ion scattering that take into account differential scattering data and the fact that symmetric charge transfer collisions are one aspect of elastic scattering collisions. These suggestions make possible a considerable improvement in the accuracy of future Monte Carlo calculations of the angular, energy, and temporal distributions of Ar+ and Ar++ ions passing through the electrode sheaths of low-pressure, rf, and dc discharges in Ar. The cross sections necessary for a proper modeling of the energy dissipation in the gas and at the electrodes by fast neutral Ar atoms formed in symmetric-charge-transfer collisions of Ar+ and Ar++ with Ar are also reviewed.