Publication | Closed Access
Hydrogenated microcrystalline silicon thin films deposited by RF-PECVD under low ion bombardment energy using voltage waveform tailoring
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Citations
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References
2012
Year
Materials ScienceEngineeringMicrofabricationNanoelectronicsSilicon On InsulatorApplied PhysicsThin FilmsChemical Vapor DepositionMicroelectronicsVoltage Waveform TailoringThin Film Processing
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