P. Roca i Cabarrocas

Plasma enhanced chemical vapor deposition of amorphous, polymorphous and microcrystalline silicon films

P. Roca i Cabarrocas · Journal of Non-Crystalline Solids · 2000 · 195 citations

Materials Science, Engineering, Microfabrication +7

Substrate selectivity in the formation of microcrystalline silicon: Mechanisms and technological consequences

P. Roca i Cabarrocas, N. Layadi, T. Heitz et al. · Applied Physics Letters · 1995 · 156 citations

Substrate Selectivity, Miniaturization, Engineering +19

<i>I</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> investigation of the growth of rf glow-discharge deposited amorphous germanium and silicon films

A. M. Antoine, B. Drévillon, P. Roca i Cabarrocas · Journal of Applied Physics · 1987 · 81 citations

Situ Investigation, Engineering, Glow Discharge +22

Properties of a new a-Si:H-like material: hydrogenated polymorphous silicon

Christophe Longeaud, Jean‐Paul Kleider, P. Roca i Cabarrocas et al. · Journal of Non-Crystalline Solids · 1998 · 78 citations

Materials Science, Engineering, H-like Material +4

Synthesis of silicon nanocrystals in silane plasmas for nanoelectronics and large area electronic devices

P. Roca i Cabarrocas, Thuat Nguyen-Tran, Y. Djeridane et al. · Journal of Physics D Applied Physics · 2007 · 78 citations

Engineering, Glow Discharge, Polycrystalline Silicon Films +24