Ihor Korolov

The effect of secondary electrons on the separate control of ion energy and flux in dual-frequency capacitively coupled radio frequency discharges

Zoltán Donkó, Julian Schulze, Péter Hartmann et al. · Applied Physics Letters · 2010 · 114 citations

Electrical Engineering, Plasma Electronics, Engineering +13

Fundamental investigations of capacitive radio frequency plasmas: simulations and experiments

Zoltán Donkó, Julian Schulze, Uwe Czarnetzki et al. · Plasma Physics and Controlled Fusion · 2012 · 108 citations

Electrical Engineering, Engineering, Physics +13

The role of electron induced secondary electron emission from SiO₂surfaces in capacitively coupled radio frequency plasmas operated at low pressures

Benedek Horváth, Manaswi Daksha, Ihor Korolov et al. · Plasma Sources Science and Technology · 2017 · 102 citations

Engineering, Plasma Science, Plasma Physics +20

The effect of ambipolar electric fields on the electron heating in capacitive RF plasmas

Julian Schulze, Zoltán Donkó, Aranka Derzsi et al. · Plasma Sources Science and Technology · 2014 · 93 citations

Capacitive Rf Plasmas, Engineering, Plasma Physics +17

Experimental Observation and Computational Analysis of Striations in Electronegative Capacitively Coupled Radio-Frequency Plasmas

Yongxin Liu, E Schüngel, Ihor Korolov et al. · Physical Review Letters · 2016 · 87 citations · Full text