Microsystem Technologies · 2018 · 19 citations · 15 references
EngineeringMicrofabricationSpeech ProcessingAcoustic CameraSpring-type DiaphragmMicro-electromechanical System
15
A MEMS Condenser Microphone for Consumer Applications
J.W. Weigold, Tim Brosnihan, Joe Bergeron et al. · 2006 · 127 citations
Engineering, Microfabrication, Acoustic Characterization +11