Chemical interactions in the atomic layer deposition of Ge–Sb–Se–Te films and their ovonic threshold switching behavior

Sijung Yoo, Chanyoung Yoo, Eui-Sang Park, Woohyun Kim, Cheol Seong Hwang

Journal of Materials Chemistry C · 2018 · 44 citations · 19 references

Concepts

Abstract

Ge–Sb–Se–Te quaternary films were prepared through atomic layer deposition (ALD) for ovonic threshold switching (OTS) applications.

References

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