Journal of Materials Chemistry C · 2018 · 44 citations · 19 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsAtomic Layer DepositionSemiconductor Device MaterialsSemiconductor Thin FilmsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsAtomic Layer Deposition InterfacesAtomic Layer Deposition KineticsAtomic Layer Deposition PrecursorsFilm Growth MechanismsPrecursor ChemistrySolid-state Chemical InteractionsSpatial Atomic Layer DepositionThermal Atomic Layer Deposition
Ge–Sb–Se–Te quaternary films were prepared through atomic layer deposition (ALD) for ovonic threshold switching (OTS) applications.
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Phase-change materials for rewriteable data storage
Matthias Wuttig, Noboru Yamada · Nature Materials · 2007 · 3.6K citations
Electronic Switching in Phase-Change Memories
A. Pirovano, Andrea L. Lacaita, A. Benvenuti et al. · IEEE Transactions on Electron Devices · 2004 · 612 citations