Effect of oxidation temperature on physical and electrical properties of ZrO2 thin-film gate oxide on Ge substrate - Concepedia

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Effect of oxidation temperature on physical and electrical properties of ZrO2 thin-film gate oxide on Ge substrate

17

Citations

30

References

2017

Year

Zhen Lei, Kian Heng Goh, Nor Ishida Zainal Abidin, Yew Hoong Wong

Thin Solid Films

Materials ScienceElectrical EngineeringOxidation TemperatureEngineeringGe SubstrateNanoelectronicsOxidation ResistanceOxide ElectronicsGallium OxideElectrical PropertiesThin Film Processing

References

	Year	Citations

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