X-ray lithography: Some history, current status and future prospects

Periodic structures for integrated optics

A. Yariv, M. Nakamura · IEEE Journal of Quantum Electronics · 1977 · 340 citations

Photonics, Optical Materials, Engineering +15

High-resolution pattern replication using soft X rays

D. L. Spears, Henry I. Smith · Electronics Letters · 1972 · 210 citations

Contactless Replication, Engineering, Electron-beam Lithography +21

Fabrication and numerical simulation of the permeable base transistor

C. O. Bozler, G.D. Alley · IEEE Transactions on Electron Devices · 1980 · 199 citations

Wide-bandgap Semiconductor, Engineering, Thin Tungsten Grating +19

High resolution, steep profile resist patterns

J. M. Moran, D. Maydan · Journal of Vacuum Science and Technology · 1979 · 116 citations

High Resolution, Engineering, Electron-beam Lithography +25

Oriented crystal growth on amorphous substrates using artificial surface-relief gratings

Henry I. Smith, D. C. Flanders · Applied Physics Letters · 1978 · 116 citations

Materials Science, Surface-relief Grating, Engineering +11