Juan R. Maldonado

X-ray lithography: Some history, current status and future prospects

Juan R. Maldonado, Martin Peckerar · Microelectronic Engineering · 2016 · 67 citations

Natural Sciences, Materials Engineering, Materials Science +10

X-ray lithography, where it is now, and where it is going

Juan R. Maldonado · Journal of Electronic Materials · 1990 · 33 citations

Natural Sciences, Manufacturing Engineering, Materials Science +8

<title>Picosecond excimer laser-plasma x-ray source for microscopy, biochemistry, and lithography</title>

I. C. E. Turcu, I. N. Ross, P. Trenda et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1994 · 31 citations

Natural Sciences, Biochemistry, Physics +13

Comparison of CsBr and KBr covered Cu photocathodes: Effects of laser irradiation and work function changes

Weidong He, Subramanian Vilayurganapathy, Alan G. Joly et al. · Applied Physics Letters · 2013 · 28 citations

Natural Sciences, Materials Engineering, Materials Science +13

Cs halide photocathode for multi-electron-beam pattern generator

Juan R. Maldonado, S. T. Coyle, Bassam Shamoun et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 22 citations

Engineering, Materials Engineering, Materials Science +13