A novel hybrid actuation mechanism based XY nanopositioning stage with totally decoupled kinematics

Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey

Guoying Gu, Chun‐Yi Su, Han Ding et al. · IEEE Transactions on Automation Science and Engineering · 2014 · 606 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +17

Design and Analysis of a Totally Decoupled Flexure-Based XY Parallel Micromanipulator

Yangmin Li, Qingsong Xu · IEEE Transactions on Robotics · 2009 · 383 citations

Engineering, Mechanical Engineering, Robotics Engineering +17

Design, Identification, and Control of a Flexure-Based <i>XY </i> Stage for Fast Nanoscale Positioning

Yuen Kuan Yong, Sumeet S. Aphale, S. O. Reza Moheimani · IEEE Transactions on Nanotechnology · 2008 · 360 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +17

Analytical modeling, optimization and testing of a compound bridge-type compliant displacement amplifier

Qingsong Xu, Yangmin Li · Mechanism and Machine Theory · 2010 · 261 citations

Engineering, Civil Engineering, Electrical Engineering +14

Development of a High-Bandwidth XY Nanopositioning Stage for High-Rate Micro-/Nanomanufacturing

Sebastian Polit, Jingyan Dong · IEEE/ASME Transactions on Mechatronics · 2010 · 240 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +17