Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey

TLDR

Piezo-actuated stages are promising for nanopositioning because of their fast response, large force, and fine resolution, yet their inherent creep, hysteresis, and lightly damped resonant vibrations make precise modeling and control challenging, prompting various techniques in the literature. This paper surveys and discusses progress in modeling and control approaches for piezo-actuated nanopositioning stages, highlighting new opportunities for extended studies. The authors review and compare different modeling and control techniques reported in the literature.

Abstract

Piezo-actuated stages have become more and more promising in nanopositioning applications due to the excellent advantages of the fast response time, large mechanical force, and extremely fine resolution. Modeling and control are critical to achieve objectives for high-precision motion. However, piezo-actuated stages themselves suffer from the inherent drawbacks produced by the inherent creep and hysteresis nonlinearities and vibration caused by the lightly damped resonant dynamics, which make modeling and control of such systems challenging. To address these challenges, various techniques have been reported in the literature. This paper surveys and discusses the progresses of different modeling and control approaches for piezo-actuated nanopositioning stages and highlights new opportunities for the extended studies.