Accurate modeling of gate tunneling currents in Metal-Insulator-Semiconductor capacitors based on ultra-thin atomic-layer deposited Al2O3 and post-metallization annealing

Joel Molina‐Reyes, Héctor Uribe-Vargas, Reydezel Torres‐Torres, Pierre Giovanni Mani-González, Alberto Herrera‐Gómez

Thin Solid Films · 2017 · 25 citations · 40 references

Concepts

References

40