Laterally vibrating lithium niobate MEMS resonators with 30% electromechanical coupling coefficient

Abstract

This paper demonstrates laterally vibrating lithium niobate (LN) microelectromechanical (MEMS) resonators operating at 500 MHz with an electromechanical coupling coefficient (k <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">t</sub> <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> ) around 30% - the highest ever attained for this class of resonators. This accomplishment is made possible by the use of direct bonding of bulk X-cut LN wafers to high resistivity silicon and a resonator electrode layout that permits harnessing the full capabilities of the film.