Experimental study on polarization-limited operation speed of negative capacitance FET with ferroelectric HfO<inf>2</inf>

Abstract

We have experimentally investigated the polarization-limited operation speed of Negative Capacitance FET (NCFET) through direct measurement of negative capacitance in transient behavior of ferroelectric HfO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> capacitor and physics-based modeling, for the first time. Systematic analysis of frequency dependence and transient characteristics of ferroelectric HfO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> capacitor enabled accurate parameter extraction. With extracted parameters, our newly developed time-dependent NCFET model provided the evidence that NCFET can operate at >MHz, which is suitable for ultralow power IoT application.