A micro-machined differential resonance accelerometer based on silicon on quartz method

A Resonant Microaccelerometer With High Sensitivity Operating in an Oscillating Circuit

Claudia Comi, Alberto Corigliano, Giacomo Langfelder et al. · Journal of Microelectromechanical Systems · 2010 · 150 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

A Seismic-Grade Resonant MEMS Accelerometer

Xudong Zou, Pradyumna Thiruvenkatanathan, Ashwin A. Seshia · Journal of Microelectromechanical Systems · 2014 · 126 citations

Engineering, Geophysics, Mechanical Engineering +17

Resonant accelerometer with self-test

M. Aikele, Karin Bauer, W. Ficker et al. · Sensors and Actuators A Physical · 2001 · 124 citations

Engineering, Mechanical Engineering, Physics +11

Post-CMOS-Compatible Aluminum Nitride Resonant MEMS Accelerometers

Roy H. Olsson, Kenneth E. Wojciechowski, Michael S. Baker et al. · Journal of Microelectromechanical Systems · 2009 · 98 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

On the resonance frequencies of microbridges

S. Bouwstra · TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers · 2002 · 84 citations

Engineering, Mechanical Engineering, Structural Analysis +16