Bo Li

Deep Reactive Ion Etching of Z-Cut Alpha Quartz for MEMS Resonant Devices Fabrication

Bo Li, Cun Li, Yulong Zhao et al. · Micromachines · 2020 · 26 citations · Full text

Engineering, Materials Engineering, Materials Science +17

An integrated packaged resonant accelerometer with temperature compensation

Bo Li, Cun Li, Yulong Zhao et al. · Review of Scientific Instruments · 2020 · 19 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +17

Noise Analysis and Performance Improvement of a MEMS Fabry-Pérot Seismic Accelerometer

Minghui Zhao, Yonghong Qi, Xiaopeng Zhang et al. · IEEE Sensors Journal · 2021 · 19 citations

Engineering, Electrical Engineering, Instrumentation +16

A micro-machined differential resonance accelerometer based on silicon on quartz method

Cun Li, Yulong Zhao, Yulong Zhao et al. · Sensors and Actuators A Physical · 2016 · 18 citations

Engineering, Electrical Engineering, Mechanical Engineering +14

Research on a Micro-Processing Technology for Fabricating Complex Structures in Single-Crystal Quartz

Chao Han, Cun Li, Yulong Zhao et al. · Micromachines · 2020 · 10 citations · Full text

Engineering, Materials Engineering, Materials Science +17