An advanced low power, high performance, strained channel 65nm technology

S. Tyagi, C. Kenyon, S.-H. Lee, N. Lindert, Miao Liu, Ramune Nagisetty, S. Natarajan, C. Parker, J. Sebastián, B. Sell,

2005 · 65 citations · 0 references

Concepts

Abstract

An advanced low power, strained channel, dual poly CMOS 65nm technology with enhanced transistor performance is presented. At 1V and off current of 100nA/mum, transistors have record currents of 1.21mA/mum and 0.71mA/mum for NMOS and PMOS respectively. This industry leading 65nm technology is currently in high volume manufacturing